ECE 516 - Introduction to MEMS: Fabrication & Applications
- Credit Hours: 3R-3L-4C
- Term Available: S
- Graduate Studies Eligible: No
- Prerequisites: Junior or Senior class standing
- Corequisites: None
Properties of silicon wafers; wafer-level processes, surface and bulk micromachining, thin-film deposition, dry and wet etching, photolithography, process integration, simple actuators. Introduction to microfluidic systems. MEMS applications: capacitive accelerometer, cantilever and pressure sensor. Cross-listed with BE 516, CHE 505, EP 510, and ME 516.